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安捷伦 4080系列参数测试系统

2007年04月06日 15:49:00 中国传动网

运行先进的加工程序的现有的和新的晶圆厂面临比以往更艰巨的参数测试挑战,必然地,参数测试已经超出了单纯地DC测量,目前包括很多种不同地测量类型,包括平行测试,闪存写入测试/抹除测试和RF S-参数描述。安捷伦科技预见这些需求研发了灵活通用的4080参数测试平台。 下一代测试平台运用超速CPU提高性能 设计新颖的4080系列参数测试平台将功能更强大的CPU和其他改进的架构相结合,无需调试程序即可提高转换的4070系列平台性能10%到20%,降低了测试时间节约成本。 虚拟多重测试技术提高动态吞吐量 所有运行SPECS(半导体加工过程评价核心软件)的4080系列检测仪采用安捷伦虚拟多重测试技术,都支持同步和异步平行测试。运用该技术与适当的测试元素组(TEG)设计相结合,使吞吐量较传统系列技术提高50%以上成为可能。 灵活的安装降低成本 4080系列测试仪有两种型号:标准低电流测试仪和超低电流测试仪,使您为每个4080系列测试仪选择最经济的配置 高速电容测试时间降低测试成本 4080系列测试仪支持可选的高速电容测试组件(HS-CMU),该组件集成到测试头电子中 HV-SPGU支持下一代闪存单元处理测试 4082F和4083A都支持半导体脉冲发生器组件(SPGU),主机和高压SPGU模块,支持先进闪存单元技术测试 RF S-参数测量和可选RF矩阵允许生产中的RF结构进行有效测试 4083A支持安捷伦PNA用于20 GHz S-参数测量。另外,20 GHz 的宽带的8x10 RF矩阵中测试多达5个RF结构。 统一的硬件平台节约投资 4080系列测试仪共享软件,易于升级,节约投资,避免设备陈旧。 复合SEMI自动化标准 SPECS-FA是安捷伦SPECS参数测试环境的工厂自动化版本,可以在4080系列测试仪所有家族产品中运行,SPECS-FA完全支持SEMI自动化标准E5 (SECS II), E30 (GEM), E87 (CMS), E39 (OSS), E40 (PMS), E90 (STS), 以及 E94 (CJM). Linux OS提高耐受性降低成本 安捷伦4080系列系统软件,安捷伦SPECS测试外壳和SPECS-FA测试外壳都采用Linux操作系统,节省成本。基于Linux系统的硬件成本更低且更易于维修。
original text [COLOR=#708090]4080 Series of Parametric Test Systems Existing and new wafer fabs running advanced processes face ever-greater parametric testing challenges. Out of necessity, parametric test has expanded beyond pure DC measurement and now spans a variety of different measurement types, including parallel test, Flash cell write/erase testing, and RF S-parameter characterization. Anticipating these needs, Agilent has developed the versatile and flexible 4080 parametric test platform. Next generation test platform boosts performance with ultra-fast CPU The newly-designed 4080 platform incorporates a more powerful CPU and other architecture improvements that boost the throughput of transferred 4070 plans by 10 to 20 percent without any program modifications. This reduces test times and saves you money. Virtual Multiple Testhead Technology offers dramatic throughput improvements All 4080 Series testers running SPECS support both synchronous and asynchronous parallel test using Agilent‘s Virtual Multiple Testhead Technology. Using this technique in conjunction with the appropriate test element group (TEG) design, it is possible to get throughput improvements of up to 50% over conventional serial techniques. Flexible configuration minimizes costs 4080 Series testers are available in two versions: standard low-current and ultra-low current, allowing you to select the most cost-effective configuration for each 4080 Series tester that you purchase. High-speed capacitance measurement reduces test times 4080 Series testers all support an optional high-speed capacitance measurement unit (HS-CMU) that is integrated into the test head electronics. HV-SPGU supports testing of next-generation Flash memory cell processes The 4082F and 4083A both support a Semiconductor Pulse Generator Unit (SPGU) mainframe and high-voltage SPGU (HV-SPGU) modules that permit testing of advanced Flash memory cell technologies. RF S-parameter measurement and optional RF matrix permit efficient testing of RF structures in production The 4083A supports an Agilent PNA for 20 GHz S-parameter measurements. In addition, an 8x10 RF matrix option with 20 GHz bandwidth is also available to enable the test of up to 5 RF test structures in a single touchdown. Uniform hardware platform protects your investment All members of the 4080 Series share the same hardware, and it is easy to upgrade from one model to another. This protects your investment and insures that your equipment does not become obsolete. Conformance to SEMI standards facilitates test automation SPECS-FA, the factory automation version of Agilent‘s SPECS test shell, runs on all models of the 4080 Series tester family. SPECS-FA fully supports SEMI automation standards E5 (SECS II), E30 (GEM), E87 (CMS), E39 (OSS), E40 (PMS), E90 (STS), and E94 (CJM). Linux OS improves supportability and lowers costs The Agilent 4080 Series system software and Agilent SPECS and SPECS-FA test shells use the Linux operating system. This saves money through the use of cheaper and more maintainable Linux-based system hardware. [/COLOR]
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